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반도체 진공펌프 및 전기.전자 반도체/LCD 전문

진공사업부

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DRY PUMP

dry pump 이미지
MAKER 분류 SERIES MODEL SERIES MODEL
EDWARDS DRY PUMP QDP/IQDP-SERIES QDP40, 80 IH-SERIES 80, 600, 1000
IQDP40, 80 1800
GV-SERIES 80, 160, 250, 400 IL-70, 80
BOOSTER PUMP > EH / QMB 250, 500, 1200 > EH / QMB 2600, 4200
PEIFFER (ALCATEL) DRY PUMP ADP SERIES 80, 81, 100, 122 ADS SERIES 501, 602, 803, 1202, 1503, 1803
ACP SERIES 28, 100  
LEYBOLD BOOSTER PUMP WA(U) SERIES 25, 150, 110, 012, 001 WS(U) SERIES 251, 501, 1001, 2001
EBARA DRY PUMP A SERIES 07, 10, 25, 30, 70, 100, 150, 300, 500 ESR SERIE 20, 200
ULVAC BOOSTER PUMP PMB SERIES 001, 003, 024, 040, 060 PRC SERIES 003, 006, 012
KASHIYAMA DRY PUMP SD SERIES 40, 60, 90, 120 COMBI 609
BOOSTER PUMP KMB SERIES 301, 601, 1201  
MARUYAMA BOOSTER PUMP ALL MODEL
KINNEY
ALL MAKER SCROLL PUMP ALL MODEL

TURBO PUMP

turbo pump 이미지
MAKER 분류 SERIES MODEL
EDWARDS T.M.P EXT-SERIES 75, 556, 240, 300, 400
STP-SERIES 300, 301, 400, 451, 600, 1000, H200C, H300C, H301C, H600, H1000
H1303, H803, A1303, A803, H1301C, A1603, A2203C, H2000C, H2001C, A3503
PEIFFER (ALCATEL) T.M.P HP SERIES 10, 80, 300, 400, 1200, 1500, 1800, 2300
ATP SERIES 80, 100, 150, 800, 900
ATH SERIES 500, 1300, 1600, 2300, 2800, 3200
TMH SERIES 064, 071, 260, 261, 520, 521, 1001, 1600
TPH SERIES 1201, 1501, 1801, 2101, 2200, 2301
LEYBOLD T.M.P TMP SERIES 50, 151, 361C, 450, 1000C, 1100C
MAG SERIES 300, 340, 400, 600, 900, 1200, 2000C, 2200C, 2800, W830, W1300, W1500, W2010
TW SERIES 150, 220, 250S, 300, 701, SL80, SL300, SL700
T SERIES 1600
ULVAC T.M.P UTM SERIES 50, 150, 350FW, 480FW, 800FW, 1001FW, 1400FW, 2300FW, 3301FW, 1200FW
EBARA T.M.P ET SERIES 300WS, 450WS, 600WS, 800WS, 1600WS
AGILLENT(VARIAN) T.M.P V SERIES 81, 301, 551, 750, 850, 1001, 2300
TV SERIES 70, 250, 300, 301, 550, 551Navigator, 701, 1000, 1001Navigator
SHIMADZU T.M.P TMP SERIES 203LM, 303LM, 403LM, 550LM, 803LM, 1003LM, 2003LM, 3203LM, 3203LM, 3403LM
280, H3603LMC
OSAKA VACUUM T.M.P TG SERIES 50, 220, 900, 1110, 1300, 2001, 2003
MITSUBISHI T.M.P TG SERIES 50, 220, 900, 1110, 1300, 2001, 2003

ROTARY PUMP

rotary pump 이미지
MAKER 분류 SERIES MODEL
EDWARDS ROTARY PUMP RV SERIES 3, 5, 8, 12
EM(1/2) SERIES 18, 28, 30, 40, 80, 175, 275
STOKES - PISTON 212~912 , 1721~1733
PEIFFER (ALCATEL) ROTARY PUMP PASCAL SERIES 2005 ~ 2021
PASCAL C2 SERIES 2012C ~ 2063C
SD SERIES 1005 ~ 2100
DUO SERIES 5, 10, 20, 2.5, 35, 65
LEYBOLD ROTARY PUMP B(CS) SERIES 4, 8, 16, 25, 40, 65
SV SERIES 10, 16, 25, 40, 65, 100, 200, 300, 500, 630, 750
ULVAC ROTARY PUMP G(LD,CD,HD)-SERIES 30 ~ 201
(V)D(S) SERIES 301, 401, 240아, 1501, 2401
PKS SERIES 016, 030, 070
AGILLENT(VARIAN) ROTARY PUMP HS SERIES 452, 652
DS SERIES 42 ~ 602
KODIVAC ROTARY PUMP ALL MODEL
WOOSUNG
WOOSUNG
AUTOMA