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반도체 진공펌프 및 전기.전자 반도체/LCD 전문

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RF Generator (Ⅰ)

eni


  • OEM-6 Series

  • OEM-12 Series

  • OEM-1250

  • OEM-2000

  • GHW-25

  • OEM-25B

  • PL2-HF

  • GMW-25 Series

  • OEM-28 Series

  • OEM-50

ae


  • RF-5S/LF-5S

  • RF-10S/LF-10S

  • RFG-1250,2000,
    3000 Series

pearl


  • RF-5S/LF-5S
MAKER Frequency MODEL MAX.POWER MODEL MAX.POWER
ENI 13.56MHz OEM-6 650 OEM-6A 650
OEM-6B 650 OEM-6XL 650
OEM-6A XL 650 OEM-650A 650
OEM-650A XL 650 650
OEM-12A-6 650 650
ACG-6 650 ACG-6A 650
ACG-6B 650 OEM-12 1250
OEM-12A 1250 OEM-12A XL 1250
OEM-12B 1250 OEM-12B3 1250
OEM-12XL 1250 ACG-10 1000
ACG-10B 1000 OEM-1250 1250
OEM-2000 2000 OEM-25B 2500
OEM-25 2500 OEM-25A 2500
OEM-25XL 2500 OEM-28B 2800
OEM-50, 50N 5000  
2MHz GMW-25 2500 GMW-50A 5000
NOVA-25 2500 NOVA-50A 5000

RF Generator (Ⅱ)

DAIHEN


  • MGA-20SA

  • DRFS-SA

  • MFG-15SA

  • DRFS-10SB

  • MFG-20SA3

AD-TEC


  • AX-1000Ⅱ

  • AX-2000/3000

MKS
REMOTE
PLASMA
SOURCE


  • ASTRON FI20620-1,
    AX7651-2 Series

  • CPS-1001/13,60

COMELCE


  • CPS-1001/13,60

  • CLF-5000

AGL / MKS
MICROWAVE
GENERATOR


  • GL-139

  • AX2115
MAKER Frequency MODEL MAX.POWER MODEL MAX.POWER
DAIHEN 400kHz MFG-15SA 1500 MFG-20SA 2000
13.56MHz DRFS-5SA 500 DRFS-10SB 1000
27.12MHz WGA-30A 3000  
COMDEL 400KHz CLF-5000 5000  
13.56MHz CPS-1001S 1000 CX-600 600
CX-2500 2500  
KYOSAN(LCD용) 13.56MHz RFK-20 2000 RFK-30 3000
RFK-50 5000 RFK-100 10000
AD-TEC 13.56MHz(LCD용) AX-300Ⅲ 300 AX-600Ⅲ 600
AX-1000 1000 AX-1000Ⅱ 1000
AX-1000Ⅲ 1000 AX-2000 2000
AX-2000Ⅲ 2000 AX-3000 3000
AX-3000Ⅲ 3000 AX-5000 5000
AX-7500 7500 AX-100000 1000
27.12MHz AX-2000-27 2000 AX-3000-27 3000
2MHz AX-3000MF 3000  
eni 27.12MHz GHW-25A 2500 GHW-50A 5000
400kHz PL-2HF 1400  
RF PP(AE 포함) 13.56MHz(LCD용) RF-5S 500 RF-10 1000
RF-10S 1000 RF-20S 2000
RF-20R 2000 RF-30S 3000
RF-50S 5000  
400kHz LF-5S 500 LF-10S 1000
LF-10A 1000 LF-20S 2000
AD-TEC 400kHz AX-1000LF 1000 AX-1500LF 1500

AMAT


  • 0010-09416(POLY)

  • 0010-09750(CVD)

  • 0010-20524(PVD)

  • 0010-30094(METAL)

  • 0010-36162(OXIDE)

  • 0010-36408(DPS)

  • 0010-13621(HE,PVD)

  • 0010-30686(HE,MXP)

  • VECTRA MATCHER

ae


  • 0010-36408(DPS)

  • 0010-13621(HE,PVD)

  • 0010-13621(HE,PVD)

PEARL


  • 0010-13621(HE,PVD)

ASTEC


  • 0010-13621(HE,PVD)

RF SEVICE


  • 0010-13621(HE,PVD)

KYOSAN


  • 0010-13621(HE,PVD)

RFPP


  • 0010-13621(HE,PVD)

trazar


  • 0010-36408(DPS)

  • 0010-13621(HE,PVD)

DRESSLER
300mm


  • 0010-36408(DPS)

  • 0010-13621(HE,PVD)

DAIHEN


  • 0010-36408(DPS)

  • 0010-13621(HE,PVD)

eni


  • 0010-36408(DPS)

  • 0010-13621(HE,PVD)
MAKER Frequency MODEL MAX.POWER MODEL MAX.POWER
AMAT ETCH OXIDE 1000 POLY 1000
METAL 1000 DPS POLY 1000
DPS METAL 1000 HE OXIDE 2000
HE METAL 2000 SIDE MATCHER 1000
THIN FILM CVD 1000 PVD 1000
ENDURA 2000 VECTRA 2000
KYOSAN(LCD용) ETCH MBK-30 3000 MKB-100 10000
RFPP(LCD용) ETCH CVD AM-30A 3000 AM-50A 5000
AD-TEC ETCH CVD AM-1000 1000 AM-2000 2000
AMV-1000 1000 AMV-2000 2000
AMV-3000 3000  
DAIHEN ETCH CVD(LCD용) MFM-20SA 2000 AMN-30C 3000
RMN-30D2 3000 RMN-50B 5000
RMN-75A 7500  
trazar CVD AMU2-1 1000 AMU2B-1 1000
AMU10E-1 1000 AMU10E-2 1000
SRN1-2 1000 SRN1-3 2000
RFDA-1 2000 AMU10H-1 1000
ETCH AMU10D-1 1000 AMU10D-2 1000
AMU10G-1 2000  

LCD 관련 RF Generator

MAKER Frequency MODEL MAX.POWER MODEL MAX.POWER
RFPP CVD(AKT) RF-20S 2000 RF-30S 3000
RF-50S 5000 AM-30A 3000
AM-50A 5000  
KYOSAN ETCH TEL RFK-20 2000 RFK-30 3000
RFK-50 5000 RFK-100 10000
MBK-30 3000 MBK-100 10000
AD-TEC CVD(AKT) AX-7500 7500 AX-1000 10000
DAIHEN ETCH CVD RMN-30D2 3000 RMA-50B 5000
RMN-75A 7500 RMN-100A 10000